An Experimental and Theoretical Study of the Impact of the Precursor Pulse Time on the Growth Per Cycle and Crystallinity Quality of Tio2 Thin Films Grown by Ald and Peald Technique

AuthID
 P-00V-9CH
4
Author(s)
Chiappim, W
·
Fraga, MA
·
Maciel, HS
·
Document Type
Article
Year published
2020
Published
in FRONTIERS IN MECHANICAL ENGINEERING-SWITZERLAND
Volume: 6
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Publication Identifiers
Wos: WOS:000682664100001
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