Amorphous Aln Films Grown by Ald from Trimethylaluminum and Monomethylhydrazine

AuthID
 P-00V-H1E
8
Author(s)
Parkhomenko, RG
·
De Luca, O
·
Kolodziejczyk, L
·
Modin, E
·
Rudolf, P
·
Martinez, DM
·
Knez, M
Document Type
Article in Press
Year published
2021
Published
in DALTON TRANSACTIONS, ISSN: 1477-9226
Volume: 50, Issue: 42, Pages: 15062-15070 (9)
Indexing
Wos®
Scopus®
Crossref®7
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85118956243
Wos: WOS:000703653100001
Source Identifiers
ISSN: 1477-9226
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