Lithographic Mask Defects Mitigation on a Multimode Interference Structure

AuthID
 P-00V-KFC
4
Author(s)
Lourenco, P
·
Fantoni, A
·
Document Type
Article
Year published
2021
Published
in OPTICA PURA Y APLICADA, ISSN: 0030-3917
Volume: 54, Issue: 3
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Publication Identifiers
Wos: WOS:000705068800006
Source Identifiers
ISSN: 0030-3917
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