Piezoresistive Silicon Thin Film Sensor Array for Biomedical Applications

AuthID
 P-002-RJF
6
Author(s)
Marins, ES
·
Document Type
Article
Year published
2011
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 519, Issue: 14, Pages: 4574-4577 (4)
Conference
6Th International Conference on Hot-Wire Cvd (Cat-Cvd) Process, Date: SEP 13-17, 2010, Location: Palaiseau, FRANCE, Sponsors: Ecole Polytech ParisTech, CNRS-INSIS, Forschungszentrum Julich, Fraunhofer IST, GVD Corp, Gifu Univ, Ctr Innovat Photovolt Systems, ULVAC Inc, Mat Design Factory Co Ltd, Top Macoat Co Ltd, Universal Systems Co Ltd
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Publication Identifiers
SCOPUS: 2-s2.0-79958838359
Wos: WOS:000292719900044
Source Identifiers
ISSN: 0040-6090
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