Tantalum-Titanium Oxynitride Thin Films Deposited by Dc Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization

AuthID
 P-00V-YM9
6
Author(s)
Cristea, D
·
Velicu, IL
·
Craciun, V
Document Type
Article
Year published
2022
Published
in COATINGS
Volume: 12, Issue: 1, Pages: 36 (16)
Indexing
Wos®
Scopus®
Crossref®7
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85122326400
Wos: WOS:000746538600001
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