Publications

AuthID
P-00W-06P

Author(s)

Maddirala, G

Searle, T

Wang, X

Alici, G

Document Type

Article

Year published

2022

Published

in APPLIED MATERIALS TODAY, ISSN: 2352-9407

Volume: 26, Pages: 101361 (10)

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Scopus^®

Crossref^®18

Handle^®

Google Scholar^®

Publication Identifiers

DOI: 10.1016/j.apmt.2021.101361

Handle: https://hdl.handle.net/10773/35245

SCOPUS: 2-s2.0-85122762064

Wos: WOS:000783939600002

Source Identifiers

ISSN: 2352-9407

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