Integrated Constraint Programming Scheduling Approach for Automated Wet-Etch Stations in Semiconductor Manufacturing

AuthID
 P-002-V71
3
Author(s)
Document Type
Article
Year published
2011
Published
in INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, ISSN: 0888-5885
Volume: 50, Issue: 3, Pages: 1705-1715 (11)
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Publication Identifiers
Scopus: 2-s2.0-79952780538
Wos: WOS:000286499800054
Source Identifiers
ISSN: 0888-5885
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