Computer-Aided Development of a Magnetron Source with High Target Utilization

AuthID
 P-002-V8Q
4
Author(s)
Document Type
Article
Year published
2011
Published
in VACUUM, ISSN: 0042-207X
Volume: 85, Issue: 8, Pages: 833-838 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-79951677102
Wos: WOS:000288478000010
Source Identifiers
ISSN: 0042-207X
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