Hfcvd Diamond Deposition Parameters Optimized by a Taguchi Matrix

AuthID
 P-002-VVV
6
Author(s)
Document Type
Article
Year published
2011
Published
in VACUUM, ISSN: 0042-207X
Volume: 85, Issue: 6, Pages: 701-704 (4)
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Scopus®
Crossref®18
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Publication Identifiers
SCOPUS: 2-s2.0-78650717376
Wos: WOS:000287438300009
Source Identifiers
ISSN: 0042-207X
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