Publications

AuthID
P-000-993

Author(s)

Document Type

Article

Year published

2004

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 7, Issue: 4-6, Pages: 243-247 (5)

Conference

Symposium on New Materials in Future Silicon Technology Held at the E-Mar 2004 Spring Meeting, Date: 2004, Location: Strasbourg, FRANCE

Indexing

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Publication Identifiers

DOI: 10.1016/j.mssp.2004.09.116

SCOPUS: 2-s2.0-9544232544

Wos: WOS:000225855200015

Source Identifiers

ISSN: 1369-8001

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