Thickness-Dependent Physical and Nanomechanical Properties of Alxga1_ Xn Thin Films

AuthID
 P-00X-2S7
6
Author(s)
Boughrara, N
·
Benzarti, Z
·
Khalfallah, A
·
Document Type
Article
Year published
2022
Published
in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001
Volume: 151, Pages: 107023 (12)
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Scopus®
Crossref®7
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85135980365
Wos: WOS:000843509200004
Source Identifiers
ISSN: 1369-8001
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