Mems Resonators with Electrostatic Actuation and Piezoresistive Readout for Sensing Applications

AuthID
 P-00X-2ZQ
4
Author(s)
Machado, G
·
Rocha, L
Document Type
Article
Year published
2022
Published
in MICRO AND NANO ENGINEERING, ISSN: 2590-0072
Volume: 16, Pages: 100158 (10)
Indexing
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-85135966883
Wos: WOS:000861203500001
Source Identifiers
ISSN: 2590-0072
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