Surface Passivation of Iii-V Gaas Nanopillars by Low-Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices

AuthID
 P-00X-7Z2
6
Author(s)
Jacob, B
·
Camarneiro, F
·
Borme, J
·
Nieder, JB
·
Document Type
Article
Year published
2022
Published
in ACS APPLIED ELECTRONIC MATERIALS
Volume: 4, Issue: 7, Pages: 3399-3410 (12)
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Publication Identifiers
Wos: WOS:000853868000001
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