Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching

AuthID
P-00X-BRX
10
Author(s)
Chiappim, W
·
Neto, BB
·
Karnopp, J
·
Goncalves, L
·
Chaves, JP
·
Sobrinho, AD
·
Leitao, JP
·
Fraga, M
·
Document Type
Review
Year published
2022
Published
in NANOMATERIALS
Volume: 12, Issue: 19
Indexing
Publication Identifiers
Pubmed: 36234624
SCOPUS: 2-s2.0-85139960372
Wos: WOS:000867958700001
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