Modelling the Strain Build-Up in Nitrogen Implanted Tungsten Films on Silicon Substrates

AuthID
 P-00X-YE5
6
Author(s)
Magalhães, S
·
Porosnicu, C
·
Pompilian, OG
·
Document Type
Article
Year published
2023
Published
in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 537, Pages: 81-87
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85147944917
Source Identifiers
ISSN: 0168-583X
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