Alnxoy Thin Films Deposited by Dc Reactive Magnetron Sputtering

AuthID
 P-003-02D
3
Author(s)
·
Document Type
Article
Year published
2010
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 257, Issue: 5, Pages: 1478-1483 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-78049251323
Wos: WOS:000283349200020
Source Identifiers
ISSN: 0169-4332
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