Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays

AuthID
P-00Y-56B
5
Author(s)
Pestana, TG
·
Pinto, RMR
·
Dias, RA
·
Document Type
Article
Year published
2023
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 32, Issue: 1, Pages: 37-46 (10)
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Publication Identifiers
Scopus: 2-s2.0-85141491248
Wos: WOS:000937941000006
Source Identifiers
ISSN: 1057-7157
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