Mno2 Counter-Electrode Structure in Ta Capacitors: A Tem Study

AuthID
 P-000-0Z2
4
Author(s)
Dias, D
·
Lohwasser, W
Document Type
Article
Year published
2005
Published
in ACTA MATERIALIA, ISSN: 1359-6454
Volume: 53, Issue: 17, Pages: 4723-4732 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-24344442052
Wos: WOS:000232177500022
Source Identifiers
ISSN: 1359-6454
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