Microfabrication of Double Proof-Mass Soi-Based Matryoshka-Like Structures for 3-Axis Mems Accelerometers

AuthID
 P-00Y-E5B
7
Author(s)
Garcia, IS
·
Fernandes, J
·
Calaza, C
·
Moreira, J
·
Document Type
Article
Year published
2023
Published
in MICRO AND NANO ENGINEERING
Volume: 19
Indexing
Wos®
Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-85159362051
Wos: WOS:001043554100001
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