The Performance of Zr as Barrier Layer for Pt Bottom Electrodes in Pb(Zr,Ti)O-3 Thin Film Capacitors

AuthID
 P-000-2RG
5
Author(s)
Document Type
Article
Year published
2005
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 483, Issue: 1-2, Pages: 21-26 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-18844398571
Wos: WOS:000229681700005
Source Identifiers
ISSN: 0040-6090
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