Structural and Composition Analysis of Gan Films Deposited by Cyclic-Pld at Different Substrate Temperatures

AuthID
P-000-394
Document Type
Article
Year published
2005
Published
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 121, Issue: 1, Pages: 131-135 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-21744452034
Wos: WOS:000229627300018
Source Identifiers
ISSN: 0924-4247
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