Electrostatically Actuated Thin-Film Amorphous Silicon Microbridge Resonators

AuthID
 P-000-3MN
3
Author(s)
·
Document Type
Article
Year published
2005
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 97, Issue: 9, Pages: 094501 (11)
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Publication Identifiers
SCOPUS: 2-s2.0-18844406032
Wos: WOS:000229155600088
Source Identifiers
ISSN: 0021-8979
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