Evolution of the Microstructure, Residual Stresses, and Mechanical Properties of W-Si-N Coatings After Thermal Annealing

AuthID
P-000-3NC
Document Type
Article
Year published
2005
Published
in JOURNAL OF MATERIALS RESEARCH, ISSN: 0884-2914
Volume: 20, Issue: 5, Pages: 1356-1368 (13)
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Publication Identifiers
SCOPUS: 2-s2.0-29144459930
Wos: WOS:000229293700035
Source Identifiers
ISSN: 0884-2914
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