Influence of the Oxygen/Argon Ratio on the Properties of Sputtered Hafnium Oxide

AuthID
 P-000-3SY
4
Author(s)
Document Type
Article
Year published
2005
Published
in MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, ISSN: 0921-5107
Volume: 118, Issue: 1-3, Pages: 210-213 (4)
Conference
Symposium on Functional Oxides for Advanced Semiconductor Technologies, Date: MAY 24-28, 2004, Location: Strasbourg, FRANCE, Sponsors: Univ Degli Studi Catania, Natl Inst Sci & Technol Mat
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-15344339242
Wos: WOS:000228514800045
Source Identifiers
ISSN: 0921-5107
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

footer slogan

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service