Publications

AuthID
P-000-692

Author(s)

Simoes, F

Editor(s)

Maher, MA; Stewart, HD

Document Type

Proceedings Paper

Year published

2005

Published

in MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY X in Proceedings of SPIE, ISSN: 0277-786X

Volume: 5715, Pages: 101-109 (9)

Conference

Conference on Micromachining and Microfabrication Process Technology X, Date: JAN 25-27, 2005, Location: San Jose, CA, Sponsors: SPIE

Indexing

Wos^®

Scopus^®

Google Scholar^®

Publication Identifiers

DOI: 10.1117/12.591944

SCOPUS: 2-s2.0-22044452376

Wos: WOS:000228834900011

Source Identifiers

ISSN: 0277-786X

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