Current-Pressure Characteristics of Planar Magnetron Discharges in Rare Gases

AuthID
 P-000-7Z1
5
Author(s)
Document Type
Article
Year published
2004
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 22, Issue: 6, Pages: 2361-2364 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-10244226725
Wos: WOS:000225505900025
Source Identifiers
ISSN: 0734-2101
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