Bottom Electrode Crystallization Method for Heat Treatments on Thin Films

AuthID
P-000-8X7
Document Type
Article
Year published
2004
Published
in REVIEW OF SCIENTIFIC INSTRUMENTS, ISSN: 0034-6748
Volume: 75, Issue: 9, Pages: 2950-2954 (5)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-7544228874
Wos: WOS:000224754800026
Source Identifiers
ISSN: 0034-6748
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