Effect of Ion Current Density on Damage in Al Ion Implanted Sic

AuthID
 P-000-A8N
7
Author(s)
Battistig, G
·
Lopez, JG
·
Morilla, Y
·
Khanh, NQ
·
Lohner, T
·
Petrik, P
·
1
Editor(s)
Vizkelethy G.McDaniel F.D.Thevuthasan S.Tesmer J.R.
Document Type
Article
Year published
2004
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 219, Issue: 1-4, Pages: 652-655 (4)
Conference
16Th International Conference on Ion Beam Analysis, Date: JUN 29-JUL 04, 2003, Location: Albuquerque, NM, Sponsors: USAF Res Lab, Lawrence Livermore Natl Lab, Los Alamos Natl Lab, Pacific NW Natl Lab, Sandia Natl Labs
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Publication Identifiers
SCOPUS: 2-s2.0-2442434377
Wos: WOS:000221895800121
Source Identifiers
ISSN: 0168-583X
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