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Systematic Characterization of Low-Pressure Capacitively Coupled Hydrogen Discharges
AuthID
P-000-AJB
5
Author(s)
Salabas, A
·
Marques, L
·
Jolly, J
·
Gousset, G
·
Alves, LL
Document Type
Article
Year published
2004
Published
in
JOURNAL OF APPLIED PHYSICS,
ISSN: 0021-8979
Volume: 95, Issue: 9, Pages: 4605-4620 (16)
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Publication Identifiers
DOI
:
10.1063/1.1690488
SCOPUS
: 2-s2.0-2442491050
Wos
: WOS:000220875400011
Source Identifiers
ISSN
: 0021-8979
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