Publications

High-Q Thin-Film Silicon Resonators Processed at Temperatures Below 110 Degrees C on Glass and Plastic Substrates

AuthID
P-000-D7P

Author(s)

Gaspar, J

Chu, V

Conde, JP

Document Type

Proceedings Paper

Year published

2004

Published

in MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST in PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN: 1084-6999

Pages: 633-636 (4)

Conference

17Th Ieee International Conference on Micro Electro Mechanical Systems, Date: JAN 25-29, 2004, Location: Maastricht, NETHERLANDS, Sponsors: IEEE Robot & Automat Soc

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