Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates

AuthID
 P-000-D82
3
Author(s)
5
Editor(s)
LaVan, DA; Ayon, AA; Madou, MJ; McNie, ME; Prasad, SV
Document Type
Proceedings Paper
Year published
2004
Published
in MICRO- AND NANOSYSTEMS in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 782, Pages: 229-234 (6)
Conference
Symposium on Micro- and Nanosystems Held at the 2003 Mrs Fall Meeting, Date: DEC 01-03, 2003, Location: Boston, MA, Sponsors: Mat Res Soc
Indexing
Wos®
Publication Identifiers
Wos: WOS:000222177500034
Source Identifiers
ISSN: 0272-9172
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