Low Incident Angle and Classical X-Ray Diffraction Analysis of Residual Stresses in Diamond Coated Si3N4

AuthID
 P-000-EM7
3
Author(s)
Belmonte, M
·
Document Type
Article
Year published
2003
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 94, Issue: 9, Pages: 5633-5638 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-0242580777
Wos: WOS:000186138600025
Source Identifiers
ISSN: 0021-8979
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