Integrated Magnetic Sensing of Electrostatically Actuated Thin-Film Microbridges

AuthID
P-000-F0N
5
Author(s)
Gaspar, J
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Li, HH
·
·
Document Type
Article
Year published
2003
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 12, Issue: 5, Pages: 550-556 (7)
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Publication Identifiers
Scopus: 2-s2.0-0242406146
Wos: WOS:000186149600003
Source Identifiers
ISSN: 1057-7157
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