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Absolute Photo-Absorption Cross Sections and Electronic State Spectroscopy of Selected Fluorinated Hydrocarbons Relevant to the Plasma Processing Industry

AuthID
P-000-FF1

Author(s)

Limao Vieira, P

Eden, S

Mason, NJ

Document Type

Article

Year published

2003

Published

in RADIATION PHYSICS AND CHEMISTRY, ISSN: 0969-806X

Volume: 68, Issue: 1-2, Pages: 187-192 (6)

Conference

2Nd Conference on Elementary Processes in Atomic Systems, Date: SEP 02-06, 2002, Location: GDANSK, POLAND, Sponsors: European Phys Soc, Host: GDANSK UNIV TECHNOL

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Publication Identifiers

DOI: 10.1016/s0969-806x(03)00278-0

Scopus: 2-s2.0-17144451085

Wos: WOS:000184164100030

Source Identifiers

ISSN: 0969-806X

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Absolute Photo-Absorption Cross Sections and Electronic State Spectroscopy of Selected Fluorinated Hydrocarbons Relevant to the Plasma Processing Industry

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