Influence of Ti Addition on the Properties of W-Ti-C/N Sputtered Films

AuthID
 P-000-FFJ
3
Author(s)
Document Type
Article
Year published
2003
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 174, Pages: 68-75 (8)
Conference
8Th International Conference on Plasma Surface Engineering, Date: SEP 09-13, 2002, Location: GARMISCH PARTENKI, GERMANY
Indexing
Wos®
Scopus®
Crossref®34
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0041856432
Wos: WOS:000185680300012
Source Identifiers
ISSN: 0257-8972
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