Implementation of the Time-Modulated Process to Produce Diamond Films Using Microwave-Plasma and Hot-Filament Cvd Systems

AuthID
P-000-FVJ
5
Author(s)
Document Type
Article
Year published
2003
Published
in VACUUM, ISSN: 0042-207X
Volume: 71, Issue: 4, Pages: 445-450 (6)
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Publication Identifiers
Scopus: 2-s2.0-0037775860
Wos: WOS:000184263800002
Source Identifiers
ISSN: 0042-207X
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