Annealing Effect on Ito Thin Films Prepared by Microwave-Enhanced Dc Reactive Magnetron Sputtering for Telecommunication Applications

AuthID
 P-000-HDR
2
Author(s)
Document Type
Article
Year published
2003
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 166, Issue: 1, Pages: 44-50 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-0037416661
Wos: WOS:000180843700007
Source Identifiers
ISSN: 0257-8972
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