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Polymorphous Silicon Deposited in Large Area Reactor at 13 and 27 Mhz

AuthID
P-000-HDT

Author(s)

Aguas, H

Cabarrocas, PRI

Lebib, S

Silva, V

Fortunato, E

Martins, R

Editor(s)

Roca i Cabarrocas PFortunato GRobertson JStutzmann M

Document Type

Article

Year published

2003

Published

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 427, Issue: 1-2, Pages: 6-10 (5)

Conference

4Th Symposium on Thin Films for Large Area Electronics Held at the Emrs 2002 Spring Conference, Date: JUN 18-21, 2002, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc

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Publication Identifiers

DOI: 10.1016/s0040-6090(02)01172-0

Scopus: 2-s2.0-0037416699

Wos: WOS:000182573200003

Source Identifiers

ISSN: 0040-6090

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Polymorphous Silicon Deposited in Large Area Reactor at 13 and 27 Mhz

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