Achievement of Nanocrystalline Structures After Thermal Annealing Amorphous W-Si-N Sputtered Films

AuthID
P-000-K6T
2
Author(s)
Marques, P
3
Editor(s)
Tsakalakos, T; Ovidko, IA; Vasudevan, AK
Document Type
Proceedings Paper
Year published
2003
Published
in NANOSTRUCTURES: SYNTHESIS, FUNCTIONAL PROPERTIES AND APPLICATIONS in NATO Science Series II-Mathematics Physics and Chemistry, ISSN: 1568-2609
Volume: 128, Pages: 383-411 (29)
Conference
Conference of the Nato-Advanced-Study-Institute on Synthesis, Functional Properties and Applications of Nanostructures, Date: JUN 29-JUL 09, 2001, Location: Iraklion, GREECE, Sponsors: NATO Adv Study Inst
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Publication Identifiers
Wos: WOS:000189453200022
Source Identifiers
ISSN: 1568-2609
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