Indium-Tin-Oxide Thin Film Prepared by Microwave-Enhanced D.c. Reactive Magnetron Sputtering for Telecommunication Wavelengths

AuthID
P-000-M1J
4
Author(s)
Crossan, E
·
Voronov, A
·
Document Type
Article
Year published
2002
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 422, Issue: 1-2, Pages: 80-86 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-0037147197
Wos: WOS:000179903800014
Source Identifiers
ISSN: 0040-6090
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