Modeling of Laser Cleaning of Metallic Particulate Contaminants from Silicon Surfaces

AuthID
 P-000-M1W
3
Author(s)
Arronte, M
·
Document Type
Article
Year published
2002
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 92, Issue: 12, Pages: 6973-6982 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-0037115581
Wos: WOS:000179495100003
Source Identifiers
ISSN: 0021-8979
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