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Deposition of Polycrystalline Diamond Films Using Conventional and Time-Modulated Cvd Processes

AuthID
P-000-M3P

Author(s)

Ali, N

Fan, QH

Ahmed, W

Gracio, J

Document Type

Article

Year published

2002

Published

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 420, Pages: 155-160 (6)

Conference

29Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 22-26, 2002, Location: SAN DIEGO, CALIFORNIA, Sponsors: AVS Sci & Technol Soc, Adv Surface Engn Div

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Publication Identifiers

DOI: 10.1016/s0040-6090(02)00793-9

SCOPUS: 2-s2.0-0037011080

Wos: WOS:000179922500026

Source Identifiers

ISSN: 0040-6090

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Deposition of Polycrystalline Diamond Films Using Conventional and Time-Modulated Cvd Processes

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