Young's Modulus of (Ti,Si)N Films by Surface Acoustic Waves and Indentation Techniques

AuthID
 P-000-PQT
6
Author(s)
·
Silva, MZ
·
Schneider, D
Document Type
Article
Year published
2002
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 408, Issue: 1-2, Pages: 160-168 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-0037012531
Wos: WOS:000175889200024
Source Identifiers
ISSN: 0040-6090
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