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Thermal Actuation of Thin Film Micro Electromechanical Structures
AuthID
P-000-PWX
5
Author(s)
Gaspar, J
·
Chu, V
·
Louro, N
·
Cabeca, R
·
Conde, JP
Document Type
Article
Year published
2002
Published
in
JOURNAL OF NON-CRYSTALLINE SOLIDS,
ISSN: 0022-3093
Volume: 299, Issue: PART 2, Pages: 1224-1228 (5)
Conference
19Th International Conference on Amorphous and Microcrystalline Semiconductors (Icams 19),
Date:
AUG 27-31, 2001,
Location:
OLD NICE, FRANCE
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Publication Identifiers
DOI
:
10.1016/s0022-3093(01)01089-4
SCOPUS
: 2-s2.0-0036530812
Wos
: WOS:000175757600098
Source Identifiers
ISSN
: 0022-3093
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