Thermal Actuation of Thin Film Micro Electromechanical Structures

AuthID
P-000-PWX
5
Author(s)
Louro, N
·
Cabeca, R
·
Document Type
Article
Year published
2002
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 299, Issue: PART 2, Pages: 1224-1228 (5)
Conference
19Th International Conference on Amorphous and Microcrystalline Semiconductors (Icams 19), Date: AUG 27-31, 2001, Location: OLD NICE, FRANCE
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0036530812
Wos: WOS:000175757600098
Source Identifiers
ISSN: 0022-3093
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