Integrated Magnetic Sensing of Electrostatically Actuated Thin-Film Microbridges

AuthID
 P-000-QX1
5
Author(s)
Li, HH
·
·
4
Editor(s)
Manginell, RP; Borenstein, JT; Lee, LP; Hesketh, PJ
Document Type
Proceedings Paper
Year published
2002
Published
in BIOMEMS AND BIONANOTECHNOLOGY in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 729, Pages: 101-106 (6)
Conference
Symposium on Mems and Biomems Held at the 2002 Mrs Spring Meeting, Date: APR 01-03, 2002, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc
Indexing
Wos®
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0036920052
Wos: WOS:000178928100014
Source Identifiers
ISSN: 0272-9172
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