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Argon Temperature and Density Versus the Input Power in a High Pressure Planar Magnetron Discharge

AuthID
P-000-S2P

Author(s)

Escrivao, ML

Pereira, PJS

Ferreira, JL

Teixeira, MR

Maneira, MJP

Document Type

Article

Year published

2002

Published

in VACUUM, ISSN: 0042-207X

Volume: 64, Issue: 3-4, Pages: 367-371 (5)

Conference

4Th Iberian Vacuum Meeting (Ivm-4), Date: JUL 13-15, 2000, Location: SAMAMANCA, SPAIN, Sponsors: Spanish Vacuum Soc, Portuguese Vacuum Soc, Host: UNIV SALAMANCA, ESCUELA POLITECN SUPERIOR

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Publication Identifiers

DOI: 10.1016/s0042-207x(01)00295-0

Scopus: 2-s2.0-0036134723

Wos: WOS:000173202300029

Source Identifiers

ISSN: 0042-207X

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Argon Temperature and Density Versus the Input Power in a High Pressure Planar Magnetron Discharge

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Argon Temperature and Density Versus the Input Power in a High Pressure Planar Magnetron Discharge

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