How Is the Chemical Bonding of W-Si-N Sputtered Coatings?

AuthID
 P-000-V57
3
Author(s)
Document Type
Article
Year published
2001
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 142, Pages: 964-970 (7)
Conference
7Th International Conference on Plasma Surface Engineering (Pse 2000), Date: SEP 17-21, 2000, Location: PARTENKIRCHEN, GERMANY
Indexing
Wos®
Scopus®
Crossref®28
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-0035386085
Wos: WOS:000171104600162
Source Identifiers
ISSN: 0257-8972
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