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Fast and Cheap Method to Qualitatively Measure the Thickness and Uniformity of Zro2 Thin Films

AuthID
P-000-WJ6

Author(s)

Aguas, H

Marques, A

Martins, R

Fortunato, E

Document Type

Article

Year published

2001

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 4, Issue: 1-3, Pages: 319-321 (3)

Conference

Spring Meeting of the European-Materials-Research-Society, Date: MAY 29-JUN 02, 2000, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc

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Publication Identifiers

DOI: 10.1016/s1369-8001(00)00106-2

SCOPUS: 2-s2.0-0035247528

Wos: WOS:000167727200074

Source Identifiers

ISSN: 1369-8001

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Fast and Cheap Method to Qualitatively Measure the Thickness and Uniformity of Zro2 Thin Films

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