Role of Ion Bombardment on the Properties of A-Si : H Films

AuthID
 P-000-XY7
3
Author(s)
Document Type
Article
Year published
2001
Published
in VACUUM, ISSN: 0042-207X
Volume: 60, Issue: 1-2, Pages: 247-254 (8)
Conference
6Th European Vacuum Conference, Date: DEC 07-10, 1999, Location: VILLURBANNE, FRANCE
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Publication Identifiers
Wos: WOS:000166207500037
Source Identifiers
ISSN: 0042-207X
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