A Study of Residual Stress on Rf Reactively Sputtered Ruo2 Thin Films

AuthID
 P-000-YPV
2
Author(s)
Document Type
Article
Year published
2000
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 375, Issue: 1-2, Pages: 29-32 (4)
Conference
International-Union-Of-Materials-Research-Societies International Conference on Advanced Materials (Iumrs-Icam 99), Date: JUN 13-18, 1999, Location: BEIJING, PEOPLES R CHINA, Sponsors: Int Union Mat Res Soc
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Publication Identifiers
SCOPUS: 2-s2.0-0342538899
Wos: WOS:000165067400008
Source Identifiers
ISSN: 0040-6090
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